- Manufacturer: Lam Research
- Part No.: 853-017643-013
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- CML Series Capacitance Diaphragm Gauges
- Connectors: 5-post terminal
- Operating Temperature: 5 - 45 °C
- Pressure Limit (bar): 17 psia or 125% of Full Scale, whichever is greater.
- Range: 100 Torr; Accuracy: 0.5% of reading (includes hysteresis, linearity and repeatability)
- Fitting: 0.5 in. OD tube
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