- Manufacturer: Nova
- Part No.: NOVASCAN 420
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- Spectrophotometer
- The NovaScan 420 integrated thickness monitoring system from Nova Measuring Instruments monitors the post-CMP thickness of each production wafer while the wafer is still in the machine.
- No cleaning or drying of the wafer is required for the non-contact measurement, and it provides valuable run-to-run control data for the CMP process in real time.
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